Document Type and Number:
Japanese Patent JP2014524942
Kind Code:
A5
Application Number:
JP2014514162
Publication Date:
January 14, 2016
Filing Date:
June 05, 2012
Export Citation:
International Classes:
C09D201/06; G03F7/11; G03F7/095; H01L21/027; C08F220/26; C09D201/08; C09D7/12; C07C211/63; C07C215/90; C07C55/08; C07C59/52; C07C59/68; C07C65/105; C07C65/03; C07C309/42