Title:
陰極アーク堆積
Document Type and Number:
Japanese Patent JP2014525984
Kind Code:
A
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Inventors:
Veil mark Jovan
Car ティンス Hermann
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Car ティンス Hermann
ジェンヴァード Accelerator
Application Number:
JP2014517694A
Publication Date:
October 02, 2014
Filing Date:
June 28, 2012
Export Citation:
Assignee:
Lamina Technologies ソシエテ アノニムLAMINA TECHNOLOGIES S. A.
International Classes:
C23C14/32; B23B27/14; C23C14/06
Domestic Patent References:
| JPH05171427A | 1993-07-09 | |||
| JP2000080466A | 2000-03-21 | |||
| JP2007515300A | 2007-06-14 | |||
| JP2008031557A | 2008-02-14 | |||
| JP2008533311A | 2008-08-21 | |||
| JP2010512251A | 2010-04-22 |
Attorney, Agent or Firm:
Masahiro Abe