Title:
デュアルチャンバ構成のパルスプラズマチャンバ
Document Type and Number:
Japanese Patent JP2014531753
Kind Code:
A5
Application Number:
JP2014529751
Publication Date:
October 01, 2015
Filing Date:
August 17, 2012
Export Citation:
International Classes:
H01L21/3065; H05H1/46; H01L21/02