Document Type and Number:
Japanese Patent JP2015004130
Kind Code:
A5
More Like This:
Application Number:
JP2014125491
Publication Date:
February 18, 2016
Filing Date:
June 18, 2014
Export Citation:
International Classes:
C22F1/10; C21D1/26; C21D9/50; B23K31/00; B23K15/00; B23K26/21; C22F1/00
Previous Patent: VAPOR DEPOSITION MASK ASSEMBLY
Next Patent: SUBSTRATE SUPPORT DEVICE, AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
Next Patent: SUBSTRATE SUPPORT DEVICE, AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME