Title:
REFLECTIVE OPTICAL ELEMENT FOR GRAZING INCIDENCE IN EUV WAVELENGTH RANGE
Document Type and Number:
Japanese Patent JP2015029092
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a reflective optical element for grazing incidence at an extreme ultraviolet wavelength, which has a reflectance as high as possible.SOLUTION: A reflective optical element 100 to be used for a collector mirror in an optical system for EUV lithography includes a reflective coating 120 containing boron and having a thickness of 50 nm or more on a substrate 110 of the reflective optical element 100.
Inventors:
VITALIY SHKLOVER
Application Number:
JP2014140047A
Publication Date:
February 12, 2015
Filing Date:
July 07, 2014
Export Citation:
Assignee:
ZEISS CARL LASER OPTICS GMBH
International Classes:
H01L21/027; G02B5/08; G02B19/00; G03F7/20
Domestic Patent References:
| JPH0862393A | 1996-03-08 | |||
| JPH11504615A | 1999-04-27 | |||
| JP2002093684A | 2002-03-29 | |||
| JP2005347757A | 2005-12-15 | |||
| JP2012500468A | 2012-01-05 | |||
| JP2013515968A | 2013-05-09 | |||
| JP2011228699A | 2011-11-10 |
Foreign References:
| US20130170056A1 | 2013-07-04 |
Attorney, Agent or Firm:
Kenji Sugimura
Ken-ichi Shimoji
Okano Daiwa
Ken-ichi Shimoji
Okano Daiwa