Title:
APERTURE PLATE
Document Type and Number:
Japanese Patent JP2015030881
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide technology of manufacturing for uniformly forming a diameter dimension of an aperture in an aperture plate to be used as a nozzle plate or a filter plate.SOLUTION: A method for manufacturing an aperture plate 24 is provided, in which an aperture is formed by growing an electroforming metal 19 over a resist pattern 17 deposited on a substrate. The method includes: a step of forming a dummy resist pattern 18 around the resist pattern for forming the aperture, the dummy resist pattern having a dimension smaller than a dimension of the resist pattern; and a step of growing the electroforming metal so as to seal the whole or a part of dummy apertures 21 formed by the dummy resist pattern.
Inventors:
KINUTA KIYOSHIZU
ICHINOZAWA YOSHIYUKI
SAIDA KATSUAKI
AOKI ERI
ICHINOZAWA YOSHIYUKI
SAIDA KATSUAKI
AOKI ERI
Application Number:
JP2013161447A
Publication Date:
February 16, 2015
Filing Date:
August 02, 2013
Export Citation:
Assignee:
OPTNICS PREC CO LTD
International Classes:
C25D1/08; B01D29/01; B01D39/20; B05B1/14; B41J2/135; C25D1/00
Domestic Patent References:
| JPS50119729A | 1975-09-19 | |||
| JPH09217191A | 1997-08-19 |
Foreign References:
| US4791436A | 1988-12-13 |