ILLUMINATION OPTICAL DEVICE AND PROJECTION EXPOSURE DEVICE

Title:

ILLUMINATION OPTICAL DEVICE AND PROJECTION EXPOSURE DEVICE

Document Type and Number:

Japanese Patent JP2015046619

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide an illumination optical device capable of reducing light quantity loss when lighting up a mask with illumination light in a predetermined polarized state, and a projection exposure device.SOLUTION: An illumination optical device includes: an illumination optical system ILS which lights up a reticle R with illumination light IL; and a projection optical system 25 which projects an image of a pattern of the reticle R on a wafer W. In the illumination optical device ILS, the illumination light IL emitted from an exposure light source 1 in a linear polarized state passes through first and second birefringent members 12 and 13 having different directions of phase advance axes to be converted into a polarized state of substantial linear polarized light in a circumferential direction around an optical axis in a substantially specified annular region, and then passes through a fly eye lens 14 etc., to light up the reticle R under a condition of annular illumination.

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Inventors:

SHIRAISHI NAOMASA

Application Number:

JP2014216961A

Publication Date:

March 12, 2015

Filing Date:

October 24, 2014

Export Citation:

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Assignee:

NIKON CORP

International Classes:

H01L21/027; G02B19/00; G03F7/20

Domestic Patent References:

JPH09184918A	1997-07-15
JP2001176766A	2001-06-29
JP2003068607A	2003-03-07
JPH07183201A	1995-07-21
JP2000114157A	2000-04-21
JP2003050455A	2003-02-21
JP2002520810A	2002-07-09
JP2001274083A	2001-10-05
JP2003035822A	2003-02-07
JPH09184918A	1997-07-15
JP2001176766A	2001-06-29
JP2003068607A	2003-03-07
JPH07183201A	1995-07-21
JP2000114157A	2000-04-21
JP2003050455A	2003-02-21
JP2002520810A	2002-07-09

Attorney, Agent or Firm:

Seiji Ono
Eiryou Kobayashi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani

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