Title:
EXPOSURE METHOD AND DEVICE, ILLUMINATION OPTICAL DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2015092604
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an exposure device and method that enables patterns of various pitches to be simultaneously transferred at high resolution respectively.SOLUTION: An exposure device comprises: an illumination optical system 12 for illuminating a reticle R with illumination light IL; and a projecting optical system PL for projecting an image of a pattern of the reticle R onto a wafer W. The exposure device comprises: a forming optical system that makes an illuminating condition for the reticle R variable, and that can create light quantity distribution by refraction optical elements 21 and 22, which generate luminous fluxes distributed in a plurality of areas where centers are arranged outside an optical axis on a predetermined face in an illumination optical system 12 conjugate with a pupil face of the projection optical system PL respectively, such that quantities of light in the plurality of areas are larger than those in other areas; and a polarization setting member for setting polarized states of the luminous fluxes generated from the refraction optical elements 21 and 22.
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Inventors:
KUDO TAKETO
HIRUKAWA SHIGERU
HIRUKAWA SHIGERU
Application Number:
JP2014256977A
Publication Date:
May 14, 2015
Filing Date:
December 19, 2014
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JPH0653120A | 1994-02-25 | |||
| JP2002231619A | 2002-08-16 | |||
| JPH07220995A | 1995-08-18 | |||
| JP2000311853A | 2000-11-07 | |||
| JP2002261004A | 2002-09-13 | |||
| JPH10208993A | 1998-08-07 | |||
| JPH05160002A | 1993-06-25 | |||
| JPH06267825A | 1994-09-22 | |||
| JPH05217840A | 1993-08-27 | |||
| JPH07147223A | 1995-06-06 | |||
| JPH06163350A | 1994-06-10 | |||
| JPH08335552A | 1996-12-17 |
Foreign References:
| WO2000011706A1 | 2000-03-02 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
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