Title:
LIGHTING OPTICAL UNIT FOR EUV MICROLITHOGRAPHY
Document Type and Number:
Japanese Patent JP2015163994
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a lighting optical unit and a projection exposure device including the same.SOLUTION: A lighting optical unit comprises: a first optical element including plural first reflection facet elements; and a second optical element including plural second reflection facet elements. The respective first elements in the first element respectively have a maximum number on a different position, and they are implemented so as to determine aggregates associated with the first facet element, and formed of the second facet elements in which the aggregates are formed of the all second elements, where the first elements guide radiation to an upper part of the lighting optical unit at different positions during operation of the lighting optical unit. The plural second facet elements form a plurality of relatively prime groups, and each of the group and aggregate includes at least two second facet elements and the two second facet elements of the aggregates belonging to the same group do not exist. The configuration can provide the lighting optical unit for applying various different angle dependence intensity distribution on a position of an object field.
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Inventors:
ENDRES MARTIN
DOERN SEBASTIAN
BIELING STIG
KIRCH MARC
DOERN SEBASTIAN
BIELING STIG
KIRCH MARC
Application Number:
JP2015114572A
Publication Date:
September 10, 2015
Filing Date:
June 05, 2015
Export Citation:
Assignee:
ZEISS CARL SMT GMBH
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JPH0651231A | 1994-02-25 | |||
| JP2003022967A | 2003-01-24 | |||
| JP2002203784A | 2002-07-19 | |||
| JP2009105206A | 2009-05-14 | |||
| JP2013084958A | 2013-05-09 | |||
| JP2005524236A | 2005-08-11 | |||
| JP2011512659A | 2011-04-21 | |||
| JP2013503460A | 2013-01-31 | |||
| JP2009512223A | 2009-03-19 | |||
| JP2006523944A | 2006-10-19 | |||
| JPH0651231A | 1994-02-25 | |||
| JP2002203784A | 2002-07-19 | |||
| JP2003022967A | 2003-01-24 | |||
| JP2009105206A | 2009-05-14 | |||
| JP2005524236A | 2005-08-11 | |||
| JP2006523944A | 2006-10-19 | |||
| JP2009512223A | 2009-03-19 | |||
| JP2011512659A | 2011-04-21 | |||
| JP2013084958A | 2013-05-09 | |||
| JP2013503460A | 2013-01-31 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi