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Title:
ILLUMINATION OPTICAL APPARATUS, EXPOSURE DEVICE AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2015172749
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical apparatus which can realize appropriate illumination conditions necessary for accurate transfer of mask patterns having varied characteristics, e.g. illumination conditions with wide variety in the light intensity distribution of the secondary light source or the polarization state.SOLUTION: An illumination optical apparatus is for lighting a surface M to be irradiated and includes illumination pupil forming means 3, 4, 7 and 8 of forming an illumination pupil distribution having a light intensity distribution located in the central region including the optical axis AX and a light intensity distribution located in a plurality of peripheral regions at intervals from the optical axis and region modification means 6(6a and 6b) of modifying the position and magnitude of the light intensity distribution located in the peripheral regions, independently of the light intensity distribution located in the central region, in the pupil surface of the illumination optical apparatus or the vicinity of the pupil surface.

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Inventors:
TANITSU OSAMU
NISHINAGA HISASHI
KUDO TAKETO
Application Number:
JP2015076937A
Publication Date:
October 01, 2015
Filing Date:
April 03, 2015
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
JP2003109895A2003-04-11
JP2003318087A2003-11-07
JP2003297727A2003-10-17
JPH0653120A1994-02-25
JP2003222710A2003-08-08
JP2002231619A2002-08-16
JPH07183201A1995-07-21
JP2000058441A2000-02-25
JPH0590128A1993-04-09
JPH06118623A1994-04-28
JPH05226225A1993-09-03
JPH11204432A1999-07-30
JPH07318847A1995-12-08
JP2006332355A2006-12-07
JP2005167254A2005-06-23
JP2003203850A2003-07-18
JP2003234285A2003-08-22
JP2003173956A2003-06-20
JP2003318086A2003-11-07
JP5761329B22015-08-12
JPH0653120A1994-02-25
JPH07183201A1995-07-21
JP2000058441A2000-02-25
JP2003109895A2003-04-11
JP2003318087A2003-11-07
JP2003297727A2003-10-17
JP2003222710A2003-08-08
JP2002231619A2002-08-16
JPH0590128A1993-04-09
JPH06118623A1994-04-28
JPH05226225A1993-09-03
JPH11204432A1999-07-30
JPH07318847A1995-12-08
JP2006332355A2006-12-07
JP2005167254A2005-06-23
Foreign References:
WO2003075076A12003-09-12
WO2003075076A12003-09-12
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani