HYDROSTATIC GAS BEARING ROTATION GUIDE DEVICE

Japanese Patent JP2015175508

A

PROBLEM TO BE SOLVED: To provide a hydrostatic gas bearing rotation guide device capable of suppressing lowering of a bearing load capacity and bearing rigidity by unifying a pressure acting on a rotary member in a circumferential direction.SOLUTION: A hydrostatic gas bearing rotation guide device includes a rotary member which is a disc-shaped member rotated around a shaft, and includes a first end face as a surface orthogonal to the shaft, a second end face as a surface in parallel with the first end face, and a side face as a surface circular when observed from the axial direction. The hydrostatic gas bearing rotation guide device includes a first air pad jetting a gas toward the first end face, a plurality of first hydrostatic gas bearings arranged at equal intervals in a circumferential direction of the rotary member, a second air pad jetting the gas toward the second end face, a plurality of second hydrostatic gas bearings arranged at equal intervals in the circumferential direction of the rotary member, a third air pad jetting the gas toward the side face, and a plurality of third hydrostatic gas bearings arranged at equal intervals in the circumferential direction of the rotary member.

SATO TOSHINORI
TAKAHASHI ATSUSHI

JP2014054970A

October 05, 2015

March 18, 2014

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NSK LTD

F16C32/06

JPS58172118U	1983-11-17
JPH11132232A	1999-05-18
JPH0680023U	1994-11-08
JP2010124565A	2010-06-03
JP2004528113A	2004-09-16
JP2006250318A	2006-09-21
JP2008298275A	2008-12-11
JP2009036343A	2009-02-19
JP2009014097A	2009-01-22

US20100254640A1

2010-10-07

Hiroaki Sakai

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