Title:
GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2015199158
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a grinding device suppressing an increase in size accompanying a large diameter of a workpiece.SOLUTION: There is provided a grinding device (2) for grinding a plate-like workpiece (11) in which a first conveyance path where a workpiece carried out by first conveyance means (12) from cassettes (10a and 10b) reaches a chuck table (40) from the first conveyance means through center position detection means (18) and single side washing means (38), and second conveyance path where the workpiece ground by grinding means (44) reaches the first conveyance means from the chuck table through double side washing means (76) are vertically superposed.
Inventors:
KUWANA KAZUTAKA
ISHIKAWA TOMOHISA
KUBO TETSUO
KUBO HIROYUKI
MIZUGUCHI YUSUKE
NAKAYAMA HIDEKAZU
ISHIKAWA TOMOHISA
KUBO TETSUO
KUBO HIROYUKI
MIZUGUCHI YUSUKE
NAKAYAMA HIDEKAZU
Application Number:
JP2014078889A
Publication Date:
November 12, 2015
Filing Date:
April 07, 2014
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/04; B24B7/00; B24B49/02; B24B49/12; B24B53/00; B24B55/02; B24B55/12; H01L21/304; H01L21/677
Domestic Patent References:
| JP2011018802A | 2011-01-27 | |||
| JP2012069677A | 2012-04-05 | |||
| JP2002083794A | 2002-03-22 | |||
| JP2000334399A | 2000-12-05 | |||
| JPH11330037A | 1999-11-30 | |||
| JP2013198960A | 2013-10-03 | |||
| JP2005153090A | 2005-06-16 | |||
| JP2010094785A | 2010-04-30 | |||
| JPH11245147A | 1999-09-14 | |||
| JP2010172999A | 2010-08-12 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto
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