Title:
孔周辺の改質表面
Document Type and Number:
Japanese Patent JP2015536406
Kind Code:
A
Abstract:
層における凹部の利用を手段として、層に通じるインターフェース内の剥離を防止する。
Inventors:
Thomas fin
Stephan Lampen Shelf
Stephan Lampen Shelf
Application Number:
JP2015542212A
Publication Date:
December 21, 2015
Filing Date:
November 05, 2013
Export Citation:
Assignee:
Siemens Actien Gezelshaft
International Classes:
F01D5/28; F01D25/00; F02C7/00
Domestic Patent References:
JP2001064761A | 2001-03-13 | |||
JP2010514984A | 2010-05-06 | |||
JP2008248733A | 2008-10-16 | |||
JPH1085977A | 1998-04-07 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Shinya Mitsuhiro