Title:
LIGHT SOURCE DEVICE, LIGHTING DEVICE, EXPOSURE DEVICE AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2016035999
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a light source device which is advantageous in terms of utilization efficiency of a light flux radiated from the light source.SOLUTION: A light source device 100 includes a light source 1 for radiating a light flux from a light emission area 1a having a predetermined size, and a light converging unit 2 for emitting a light flux to the outside while converging the light flux. The light emission area 1a has a rotationally symmetrical light emission intensity distribution. The light converging unit 2 has four or more reflection mirrors which are disposed to be rotationally symmetrical with respect to the rotational symmetrical axis of the light emission area 1a as an optical axis and surround the light emission area 1a, and have reflection faces for emitting the light flux radiated from the light emission area 1a. The four or more reflection mirrors includes elliptical surface reflection mirrors 21, 23 whose reflection faces are elliptical surfaces, and spherical surface reflection mirrors 22, 24 whose reflection faces are spherical surfaces. The elliptical surface reflection mirrors 21, 23 and the spherical surface reflection mirrors 22, 24 are alternately arranged in the optical axis direction, and a light flux reflected from one spherical surface reflection mirror (for example, the spherical reflection mirror 24) is further reflected and emitted to the outside by the other elliptical surface reflection mirror (for example, the elliptical surface reflection mirror 21) which confronts the former elliptical surface reflection mirror across the light emission area 1a.SELECTED DRAWING: Figure 1
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Inventors:
KAWASHIMA HARUNA
Application Number:
JP2014159144A
Publication Date:
March 17, 2016
Filing Date:
August 05, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; F21S2/00; G02B19/00
Domestic Patent References:
| JP2000353418A | 2000-12-19 | |||
| JP2000123611A | 2000-04-28 | |||
| JP2005032972A | 2005-02-03 | |||
| JP2012256600A | 2012-12-27 | |||
| JPH09190967A | 1997-07-22 | |||
| JP2014530509A | 2014-11-17 | |||
| JP4705852B2 | 2011-06-22 |
Foreign References:
| US5625738A | 1997-04-29 | |||
| US20050237764A1 | 2005-10-27 | |||
| EP0376398A2 | 1990-07-04 |
Attorney, Agent or Firm:
Ryoichi Takaoka
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