Title:
OPTICAL DEVICE, LITHOGRAPHY DEVICE, AND MANUFACTURING METHOD OF ARTICLE
Document Type and Number:
Japanese Patent JP2016039258
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an optical device advantageous in adjustment of optical performance through an aperture stop.SOLUTION: An optical device 100 includes: an aperture stop 3 including a first member 3a and a second member 3b each having two facing end parts defining an aperture on an optical axis; and a drive mechanism 4 for changing a size of the aperture by moving only one of the first member 3a and a second member 3b.SELECTED DRAWING: Figure 1
Inventors:
YAMAGUCHI WATARU
INA HIDEKI
CHITOKU KOICHI
NISHIDA TOSHIHIKO
INA HIDEKI
CHITOKU KOICHI
NISHIDA TOSHIHIKO
Application Number:
JP2014161791A
Publication Date:
March 22, 2016
Filing Date:
August 07, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G02B19/00
Attorney, Agent or Firm:
Ryoichi Takaoka
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