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Title:
ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING ARTICLE
Document Type and Number:
Japanese Patent JP2016063185
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical device advantageous for illuminating a surface to be illuminated uniformly with high illuminance, while avoiding up-sizing.SOLUTION: An illumination optical device 101 for illuminating a surface R to be illuminated by using a light beam from a light source 101 has a condenser 2 for condensing the light beam at a first angle θfor the optical axis from a light source 1 toward the surface R to be illuminated, an optical integrator 6 for making the light intensity distribution on the emission end face uniform, by reflecting a light beam incident from an incident end face a plurality of times, and light beam formation parts 3, 5 for making light incident to the incident end face of the optical integrator 6 at a second angle θlarger than the first angle θfor the optical axis, and illuminates the surface R to be illuminated with the light from the optical integrator 6.SELECTED DRAWING: Figure 1

Inventors:
SUDA HIROMI
Application Number:
JP2014192436A
Publication Date:
April 25, 2016
Filing Date:
September 22, 2014
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; G02B5/02; G02B19/00; G03F7/20
Domestic Patent References:
JP2000021765A2000-01-21
JP2000162707A2000-06-16
JP2008047887A2008-02-28
JPH03202148A1991-09-03
JP2003243276A2003-08-29
JP2005116831A2005-04-28
JP2002139844A2002-05-17
JP2000021765A2000-01-21
JP2000162707A2000-06-16
JP2008047887A2008-02-28
Attorney, Agent or Firm:
Ryoichi Takaoka



 
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