Document Type and Number:
Japanese Patent JP2016089886
Kind Code:
A5
Application Number:
JP2014222530
Publication Date:
November 30, 2017
Filing Date:
October 31, 2014
Export Citation:
International Classes:
F16H13/04; F02B67/06
Previous Patent: VALVE, FLUID CONTROL DEVICE, SEMICONDUCTOR CONTROL DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD
Next Patent: ACTUATOR
Next Patent: ACTUATOR