Title:
ILLUMINATION OPTICAL DEVICE AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2016100461
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical device which avoids the increase in size and cost of the illumination optical device caused by the increase of the number of optical components and the complication of an image formation optical system and is capable of improving the illuminance uniformity of illumination light on a surface to be illuminated and adjusting telecentricity.SOLUTION: The illumination optical device illuminating a surface to be illuminated 112 with light from a light source 101 includes an internal reflection type optical integrator 103, an image formation optical system 106 for projecting the emission end surface 105 of the optical integrator onto the surface to be illuminated 112, and adjustment means 121 for adjusting the telecentricity of the light with which the surface to be illuminated 112 is illuminated.SELECTED DRAWING: Figure 3
Inventors:
MIZUTANI MASAKI
Application Number:
JP2014236356A
Publication Date:
May 30, 2016
Filing Date:
November 21, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
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Attorney, Agent or Firm:
Ryoichi Takaoka
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