Title:
フレキシブル基板処理装置の処理チャンバの洗浄方法及び洗浄を実施するための装置及びそこで使用するためのロール
Document Type and Number:
Japanese Patent JP2016527398
Kind Code:
A5
Application Number:
JP2016526647
Publication Date:
August 31, 2017
Filing Date:
July 17, 2014
Export Citation:
International Classes:
C23C16/44; H01L21/3065; H01L21/205
Previous Patent: JP2016527397
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