Title:
MICROWAVE PLASMA SOURCE, MICROWAVE PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2018125114
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique for reliably detecting the sign of an ignition failure of microwave plasma to prevent the ignition failure.SOLUTION: A microwave plasma source comprises: a microwave generating part 69 for generating microwaves; a waveguide 67, 65 for propagating microwaves generated by the microwave generating part 69; an antenna part 60 having a slot antenna 62 for radiating microwaves having propagated through the waveguide into a processing space, and a microwave-permeable plate 61 made of a dielectric which allows microwaves radiated from the slot to transmit therethrough; a temperature detector 80 for detecting a temperature at a predetermined position in a microwave-travelling path running to the slot antenna; and an abnormality detector part 81 which accepts the input of a temperature detected by the temperature detector and based on the input temperature, makes detection about the abnormality in the microwave-travelling path.SELECTED DRAWING: Figure 4
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Inventors:
TANIIKE YASUAKI
Application Number:
JP2017015089A
Publication Date:
August 09, 2018
Filing Date:
January 31, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H05H1/46; C23C16/511; C23C16/52; H01L21/3065; H01L21/31
Attorney, Agent or Firm:
Hiroshi Takayama