Title:
LIGHT-IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2018133452
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To hermetically seal a processing space by a seal member while uniformly forming a gap between a window member and a stage.SOLUTION: A light-irradiation device 100 comprises: a light source part 10 for irradiating with light through a window member 12; a stage 21 opposed to the window member 12 and arranged to put an object to be processed (work W) on; a support member (window frame member 16) for supporting the window member 12 at its peripheral edge; and a seal member 17 for hermetically sealing a processing space between the window member 12 and the stage 21. The seal member 17 is an expandable seal formed to be hollow in section, and made of an elastic material, which is expanded in section when a fluid flows into the hollow space. The seal member is disposed between the support member and an outer peripheral side face of the stage 21. When forced to abut against the outer peripheral side face of the stage 21, the seal member hermetically seals the processing space. The outer periphery side face part of the stage 21 has a heat insulation structure 22.SELECTED DRAWING: Figure 1
Inventors:
NOMOTO KENTARO
KIKUIRI HAJIME
KIKUIRI HAJIME
Application Number:
JP2017026247A
Publication Date:
August 23, 2018
Filing Date:
February 15, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
H01L21/302; B01J19/12
Domestic Patent References:
| JP2015111611A | 2015-06-18 | |||
| JP2015126162A | 2015-07-06 | |||
| JP2016072375A | 2016-05-09 | |||
| JP2016084983A | 2016-05-19 | |||
| JP2015076457A | 2015-04-20 |
Attorney, Agent or Firm:
Megumi Konishi
Shigeyuki Nagaoka
Shigeyuki Nagaoka