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Title:
OBSERVATION DEVICE, OBSERVATION SYSTEM, AND METHOD FOR CONTROLLING OBSERVATION DEVICE
Document Type and Number:
Japanese Patent JP2018136178
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an observation device which can acquire information on the depth of a target object.SOLUTION: An observation device 100 includes: an imaging unit 151 having an enlargement optical system and a first imaging optical system as an object-side non-telecentric optical system, the imaging unit taking an image of a sample 300 using the first imaging optical system and acquiring a first image; a moving mechanism 160 for changing the relative position of the sample 300 and the imaging unit 151; and a three-dimensional information acquisition unit for acquiring the three-dimensional information on the sample 300 on the basis of two or more first images acquired at different positions in the imaging unit 151 and information on each of the positions where the first images were acquired.SELECTED DRAWING: Figure 1

Inventors:
AMINO HIROKI
HARA SATOSHI
HARA TAKETO
KATO SHIGERU
MATSUNE HIDEAKI
KODAMA YUTAKA
NONAKA OSAMU
Application Number:
JP2017029999A
Publication Date:
August 30, 2018
Filing Date:
February 21, 2017
Export Citation:
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Assignee:
OLYMPUS CORP
International Classes:
G01B11/24; G02B21/00; G02B21/36
Domestic Patent References:
JP2006011145A2006-01-12
JP2016157197A2016-09-01
JP2013088490A2013-05-13
JP2016070720A2016-05-09
Foreign References:
US20070195314A12007-08-23
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Naoki Kono
Tadashi Inoue
Ukai Ken