Title:
APPARATUS AND METHOD FOR MANUFACTURING LAMINATED FILM AND METHOD FOR MANUFACTURING THIN FILM INDUCTOR
Document Type and Number:
Japanese Patent JP2018141195
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus and method for manufacturing a laminated film, capable of efficiently manufacturing a laminated film having only a specific thin film formed to be thinner than other films by a smaller-sized apparatus, and a method for manufacturing a thin film inductor.SOLUTION: A method for manufacturing a laminated film comprises: increasing the pressure of a second chamber 8 higher than that of a first chamber 6 in a sealable chamber 4 including the first chamber 6 and second chamber 8 communicably separated by a partition 10 in the inside; moving a substrate 12 from the first chamber 6 to the second chamber 8 in the inside of the chamber 4 to deposit an insulator film 32 on a magnetic film 31a formed in the first chamber 6 in the inside of the second chamber 8; and moving the substrate 12 from the second chamber 8 to the first chamber 6 in the inside of the chamber 4 to deposit a magnetic film 31a different from the magnetic film 31a positioned in the lower part on the insulator film 31a in the inside of the first chamber 6.SELECTED DRAWING: Figure 1
Inventors:
AMANO HAJIME
HARADA AKIHIRO
HARADA AKIHIRO
Application Number:
JP2017035263A
Publication Date:
September 13, 2018
Filing Date:
February 27, 2017
Export Citation:
Assignee:
TDK CORP
International Classes:
C23C14/06; C23C14/34
Domestic Patent References:
| JPH0437260U | 1992-03-30 | |||
| JP2012031503A | 2012-02-16 | |||
| JPH0963844A | 1997-03-07 | |||
| JP2000012366A | 2000-01-14 | |||
| JP2014227566A | 2014-12-08 |
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation