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Title:
HOUSING AND METHOD FOR INSTALLING SUBSTRATE THEREIN
Document Type and Number:
Japanese Patent JP2018142584
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a housing capable of accommodating a plurality of kinds of substrates and a method for installing the substrate in the housing.SOLUTION: A housing 100 includes a substrate support unit 10 and a substrate support body 80 therein. The substrate support unit 10 includes a first support unit capable of supporting a first substrate at a first substrate support position in the housing 100. The substrate support body 80 includes a second support unit capable of supporting a second substrate at the first substrate support position.SELECTED DRAWING: Figure 5

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Inventors:
TAGASHIRA TAKESHI
Application Number:
JP2017034990A
Publication Date:
September 13, 2018
Filing Date:
February 27, 2017
Export Citation:
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Assignee:
KAWASAKI HEAVY IND LTD
International Classes:
H05K7/14
Domestic Patent References:
JP3068461U2000-05-12
JP2002353662A2002-12-06
JPH01112093U1989-07-27
JP2004193373A2004-07-08
Attorney, Agent or Firm:
Patent business corporation Yuko patent office



 
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