Title:
HOLDING PAD AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2018144191
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a holding pad which is excellent in holding force of an object to be polished and has high durability because of causing less plastic deformation, and is also excellent in chemical resistance, and a method for producing the same.SOLUTION: A holding pad 10 has a holding part 11 holding an object W to be polished, where the holding part 11 is a non-foamed resin sheet in which a loss elastic modulus ratio (E"[6.3]/E"[0.1]) of 6.3 rad/s with respect to an angular frequency at 25°C of 0.1 rad/s is 2.00-6.50.SELECTED DRAWING: Figure 1
Inventors:
SAEKI TAKU
KUMAGAI TAKAO
NAGASHIMA TAKUMI
KUMAGAI TAKAO
NAGASHIMA TAKUMI
Application Number:
JP2017043643A
Publication Date:
September 20, 2018
Filing Date:
March 08, 2017
Export Citation:
Assignee:
FUJIBO HOLDINGS INC
International Classes:
B24B37/30; B24B41/06; H01L21/304
Domestic Patent References:
| JP2002337048A | 2002-11-26 | |||
| JP2014097554A | 2014-05-29 | |||
| JP2006035762A | 2006-02-09 | |||
| JP2011212822A | 2011-10-27 |
Foreign References:
| US5533924A | 1996-07-09 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito