Title:
FILM DEPOSITION METHOD
Document Type and Number:
Japanese Patent JP2018145478
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To easily form a DLC film on the inner wall surface of a long narrow tube made of a medical material.SOLUTION: A film deposition method comprises the steps of: arranging a long narrow tube 102 having non-conductivity in a chamber 101 capable of controlling internal pressure; generating plasma in the inside of the long narrow tube 102 in the state that raw material gas including hydrocarbon is supplied; and forming a diamond like carbon film on the inner wall surface of the long narrow tube 102. The long narrow tube 102 has a discharge electrode 125 arranged in one end portion, and the other end portion is arranged in the chamber 101 in an opened state. An AC bias is intermittently applied between the discharge electrode 125 and a counter electrode 126 provided to be separated from the long narrow tube 102.SELECTED DRAWING: Figure 1
Inventors:
IMAI YUICHI
NAKATANI TATSUYUKI
OZAWA SUSUMU
FUJII YASUHIRO
UCHIDA HARUHITO
NAKATANI TATSUYUKI
OZAWA SUSUMU
FUJII YASUHIRO
UCHIDA HARUHITO
Application Number:
JP2017042037A
Publication Date:
September 20, 2018
Filing Date:
March 06, 2017
Export Citation:
Assignee:
STRAWB INC
KAKE EDUCATIONAL INST
UNIV OKAYAMA
KAKE EDUCATIONAL INST
UNIV OKAYAMA
International Classes:
C23C16/27; A61F2/06; A61L27/30; A61L27/50; A61L27/56; A61L29/10; A61L29/14; A61M25/00; C01B32/05; C23C16/503
Domestic Patent References:
| JP2008192567A | 2008-08-21 | |||
| JPH05237141A | 1993-09-17 | |||
| JPH06246142A | 1994-09-06 | |||
| JP2000503874A | 1998-07-22 | |||
| JP2015147974A | 2015-08-20 | |||
| JP2006216468A | 2006-08-17 |
Foreign References:
| WO2009123243A1 | 2009-10-08 |
Attorney, Agent or Firm:
Maeda patent office