Title:
THREE-DIMENSIONAL RAMAN SPECTROSCOPY
Document Type and Number:
Japanese Patent JP2018146410
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a three-dimensional Raman spectroscopy that enables a highly accurate three-dimensional Raman spectroscopic analysis.SOLUTION: A three-dimensional Raman spectroscopy comprises: a Raman spectroscopic measurement step of conducting a Raman spectroscopic analysis relative to a measured sample using a plurality m of focal planes F(i is an integer of 1 to m) being two or more focal planes, using a confocal optical system; and a true value calculation step of calculating a true Raman spectroscopic value Won the plurality of focal planes using measurement data Won the plurality m of focal planes Fbeing two or more focal planes acquired at the Raman spectroscopic analysis measurement step. The true value calculation step is a step of making m simultaneous equations in which each measurement data Wintegrates a Raman true value W(j is an integer of 1 to m) at each position with a weight Rgiven to the Raman true value Wand the integrated true value is equal to standardization, and obtaining a true value Wby solving the m simultaneous equations.SELECTED DRAWING: Figure 1
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Inventors:
WANG HONGXIN
ZHANG HAN
DAE BO
FUJITA DAISUKE
ZHANG HAN
DAE BO
FUJITA DAISUKE
Application Number:
JP2017042239A
Publication Date:
September 20, 2018
Filing Date:
March 06, 2017
Export Citation:
Assignee:
NAT INST MATERIALS SCIENCE
International Classes:
G01N21/65; G01J3/44; G02B21/06; H01L21/66
Domestic Patent References:
| JPH0933437A | 1997-02-07 | |||
| JP2008539417A | 2008-11-13 | |||
| JPH09297112A | 1997-11-18 | |||
| JPH06148076A | 1994-05-27 | |||
| JP2013036872A | 2013-02-21 | |||
| JP2010019630A | 2010-01-28 |
Foreign References:
| US20150276480A1 | 2015-10-01 |
Other References:
EVERALL,NEIL: "The Influence of Out-of-Focus Sample Regions on the Surface Specificity of Confocal Raman Microscopy", APPLIED SPECTROSCOPY, vol. 62(6), JPN6020029174, 2008, pages 591 - 598, ISSN: 0004322056