Title:
CONVEYING SYSTEM AND CONVEYING METHOD
Document Type and Number:
Japanese Patent JP2018177376
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a conveying system and a conveying method capable of improving efficiency of conveying an object to be conveyed to a device port.SOLUTION: The conveying system includes: a first track 11 and a second track 12; a plurality of overhead conveying vehicles 20 that travel along the first track 11 and the second track 12 respectively to convey FOUP 90; a first storage unit 30a to which the overhead conveying vehicle 20 stopping on the first track 11 can transfer the FOUP 90; a second storage unit 30b to which the overhead conveying vehicle 20 stopping on the second track 12 can transfer the FOUP 90; and a storage device 30 used for the overhead conveying vehicle 20 stopping on the second track 12 to transfer the FOUP 90 to each of the device ports 101 available for the FOUP 90 to be transferred.SELECTED DRAWING: Figure 2
Inventors:
SAKAI SHIGEKI
AOKI EIJIRO
AOKI EIJIRO
Application Number:
JP2015177296A
Publication Date:
November 15, 2018
Filing Date:
September 09, 2015
Export Citation:
Assignee:
MURATA MACHINERY LTD
International Classes:
B65G1/04; H01L21/673
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama