Title:
VACUUM PUMP AND ITS HEATING DEVICE
Document Type and Number:
Japanese Patent JP2018200041
Kind Code:
A
Abstract:
To provide a vacuum pump and its heating device suitable for elongating a life of heating means used as countermeasure of preventing accumulation of product material in a vacuum pump.SOLUTION: A vacuum pump for discharging a gas by rotation of a rotor, has an exhaust flow channel for discharging the gas, and heating means HM for heating the exhaust flow channel. The heating means HM is constituted by connecting a plurality of resistance heating elements RE in parallel to a pair of wiring lines WL1, WL2. Further the heating means HM includes current measurement means 101 measuring the total sum of electric current values flowing in the plurality of resistance heating elements RE, determination means 102 determining a degree of trouble of the plurality of resistance heating elements RE on the basis of the measurement value of the current measurement means 101, and output means 103 outputting the degree of trouble determined by the determination means 102.SELECTED DRAWING: Figure 2
Inventors:
OTACHI YOSHINOBU
MAEJIMA YASUSHI
TAKAADA TSUTOMU
MAEJIMA YASUSHI
TAKAADA TSUTOMU
Application Number:
JP2017106108A
Publication Date:
December 20, 2018
Filing Date:
May 30, 2017
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04
Domestic Patent References:
| JP2015031153A | 2015-02-16 | |||
| JPH04201358A | 1992-07-22 | |||
| JPH08310030A | 1996-11-26 | |||
| JPS6345755Y2 | 1988-11-28 | |||
| JPS5438611Y2 | 1979-11-16 |
Foreign References:
| CN101755481A | 2010-06-23 |
Attorney, Agent or Firm:
Shigenori Wada