Title:
PRESSURE SENSOR INCLUDING DEFORMABLE PRESSURE VESSEL
Document Type and Number:
Japanese Patent JP2019007966
Kind Code:
A
Abstract:
To provide a pressure sensor not affected by outside package stress.SOLUTION: A pressure vessel 520 is an object that has a cross section that defines a void. The deformable pressure vessel 520 has at least one curved portion that is configured to structurally deform (e.g., bend deformation, shear deformation, elongate deformation, etc.) on the basis of pressure difference between cavity pressure in a cavity 586 in which at least a portion of the pressure vessel 520 is suspended and vessel pressure in the pressure vessel 520.SELECTED DRAWING: Figure 5
Inventors:
SCOTT G ADAMS
CHARLES W BLACKMER
KRISTIN J LYNCH
CHARLES W BLACKMER
KRISTIN J LYNCH
Application Number:
JP2018151047A
Publication Date:
January 17, 2019
Filing Date:
August 10, 2018
Export Citation:
Assignee:
KIONIX INC
International Classes:
G01L7/04; G01P15/08; G01P15/125; H01L29/84
Attorney, Agent or Firm:
Shinjiro Ono
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Osamu Hoshino
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Osamu Hoshino