Title:
WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL DEVICE, ELECTRONIC APPARATUS, AND METHOD FOR MANUFACTURING WAVELENGTH VARIABLE INTERFERENCE FILTER
Document Type and Number:
Japanese Patent JP2019015865
Kind Code:
A
Abstract:
To provide a wavelength variable interference filter that can be miniaturized, an optical device, an electronic apparatus, and a method for manufacturing a wavelength variable interference filter.SOLUTION: A wavelength variable interference filter comprises: a first mirror; and a substrate that is provided with a second mirror opposed to the first mirror and has a first surface opposed to the first mirror and a second surface on the opposite side of the first surface. At least any one of the first surface and second surface of the substrate is provided with a first concave part that has a bottom part and a curved part curved from the outer periphery of the bottom part toward the outer periphery of the substrate. In plan view seen from the thickness direction of the substrate, the bottom part includes a mirror area overlapping the first mirror and the second mirror and a diaphragm area arranged on the outer periphery of the mirror area.SELECTED DRAWING: Figure 2
Inventors:
MIYASHITA TAKESHI
Application Number:
JP2017133414A
Publication Date:
January 31, 2019
Filing Date:
July 07, 2017
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02B26/00; B81B3/00; G01J3/26
Domestic Patent References:
| JP2011191554A | 2011-09-29 | |||
| JP2014119685A | 2014-06-30 | |||
| JP2016138915A | 2016-08-04 | |||
| JP2016118468A | 2016-06-30 | |||
| JP2013022534A | 2013-02-04 | |||
| JP2015152713A | 2015-08-24 |
Foreign References:
| US20020114053A1 | 2002-08-22 | |||
| US20150276533A1 | 2015-10-01 | |||
| US20060118721A1 | 2006-06-08 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Satoshi Nakai
Satoshi Nakai