Title:
FLUID CONTAINING MEMBER
Document Type and Number:
Japanese Patent JP2019021908
Kind Code:
A
Abstract:
To provide a fluid containing member that suppresses mixture of fluids contained in two containing chambers caused by breakage of a separation film between the two containing chambers.SOLUTION: A fluid containing member includes a first containing chamber that contains a first fluid, and a second containing chamber that contains a second fluid. The first containing chamber and the second containing chamber are separated from each other by a first separation film on a side of the first containing chamber and a second separation film on a side of the second containing chamber. The first separation film and the second separation film are partly connected to each other or partly contact each other so as to move together in accordance with a change in an internal pressure of the first containing chamber or an internal pressure of the second containing chamber.SELECTED DRAWING: Figure 1
Inventors:
KAWAHARA NOBUMICHI
MITA YUTAKA
ARAKI YOSHIMASA
HASEGAWA TAKAYASU
MITA YUTAKA
ARAKI YOSHIMASA
HASEGAWA TAKAYASU
Application Number:
JP2018094398A
Publication Date:
February 07, 2019
Filing Date:
May 16, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; B05C11/10
Domestic Patent References:
| JP2013035248A | 2013-02-21 | |||
| JP2016164961A | 2016-09-08 | |||
| JP2004140099A | 2004-05-13 | |||
| JP2015092549A | 2015-05-14 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa