Title:
HOLDING PAD
Document Type and Number:
Japanese Patent JP2019042905
Kind Code:
A
Abstract:
To suppress occurrence of characteristic polishing unevenness on a polished surface of a polished object in a polishing work using a holding pad.SOLUTION: There is provided a holding pad 100 in which a double-sided adhesive tape 20 is stuck to an opposite side surface of a holding surface 11 of a polyurethane resin sheet 10, where an extension direction of a boundary G1 between a plurality of non-support type adhesive tapes 21 provided on one surface of a tape base material 20A and an extension direction of a boundary G2 between a plurality of non-support type adhesive tapes 22 provided on the other surface of the tape base material 20A are arranged so as to cross each other.SELECTED DRAWING: Figure 1
Inventors:
TAKAGI MASATAKA
Application Number:
JP2017171621A
Publication Date:
March 22, 2019
Filing Date:
September 06, 2017
Export Citation:
Assignee:
FUJIBO HOLDINGS INC
International Classes:
B24B37/30
Domestic Patent References:
| JPH11320386A | 1999-11-24 | |||
| JP2005177961A | 2005-07-07 |
Foreign References:
| WO2016111208A1 | 2016-07-14 |
Attorney, Agent or Firm:
Shuji Shiokawa