Title:
LIGHT IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2019046618
Kind Code:
A
Abstract:
To provide a light irradiation device capable of easily obtaining cover glass capable of being used even in a case where a workpiece enlarges, and capable of preventing deterioration of illuminance uniformity ratio caused by using one sheet of cover glass.SOLUTION: A light irradiation device 1 comprises: a chamber 50 storing a workpiece W; a plurality of irradiators 9 arranged outside the chamber 50 along an upper surface 50A, where the upper surface is a light incident surface of the chamber 50; and cover glass 61 provided on the upper surface 50A of the chamber 50, and transmitting light from the irradiators 9. The cover glass 61 is composed of a plurality of glass plates aligning along the upper surface 50A.SELECTED DRAWING: Figure 1
Inventors:
ISHITOBI HIROKAZU
SHIMAMURA HIROYUKI
SHIMAMURA HIROYUKI
Application Number:
JP2017167273A
Publication Date:
March 22, 2019
Filing Date:
August 31, 2017
Export Citation:
Assignee:
IWASAKI ELECTRIC CO LTD
International Classes:
F21S2/00; F21V15/01
Domestic Patent References:
| JP2012174879A | 2012-09-10 | |||
| JP2002303988A | 2002-10-18 | |||
| JP2017012988A | 2017-01-19 |
Attorney, Agent or Firm:
Patent Business Corporation Kushibuchi International Patent Office