Title:
FASTENING STRUCTURE, PLASMA PROCESSING DEVICE INCLUDING THE SAME, AND NUT FOR FASTENING STRUCTURE
Document Type and Number:
Japanese Patent JP2019056481
Kind Code:
A
Abstract:
To provide a fastening structure which can be used for a long time, a plasma processing device including the fastening structure, and a nut used in the fastening structure.SOLUTION: A fastening structure 20 of the invention includes: a bolt 3; a nut 4 which may threadedly engage with the bolt 3; a groove-like nut storage part 2 which is provided at a first member (an upper electrode 12) and can store the nut; and a through part 14b which is provided at the second member (a shower head 14) and into which the bolt is inserted. The nut storage part has: a first area 21 into which the nut may be inserted from a direction perpendicular to a bottom surface 26 of the nut storage part and a second area 22 which is connected to the first area and has removal preventing means 23 which prevents removal of the nut in the direction perpendicular to the bottom surface of the nut storage part. The nut inserted into the first area can slide to the second area and the bolt inserted into the through part can threadedly engage with the nut in a state that the nut has moved to the second area.SELECTED DRAWING: Figure 13
Inventors:
TOMISAKA KENICHI
Application Number:
JP2017182846A
Publication Date:
April 11, 2019
Filing Date:
September 22, 2017
Export Citation:
Assignee:
SPP TECH CO LTD
International Classes:
F16B5/02; F16B5/10; F16B37/04; H01L21/205
Domestic Patent References:
| JP5073644B2 | 2012-11-14 | |||
| JPH061825U | 1994-01-14 | |||
| JP2012041900A | 2012-03-01 | |||
| JP3726850B2 | 2005-12-14 | |||
| JPH0671913U | 1994-10-07 | |||
| JPH08170612A | 1996-07-02 | |||
| JPH0577607U | 1993-10-22 | |||
| JPS5224179U | 1977-02-19 |
Foreign References:
| KR100808926B1 | 2008-03-03 |
Attorney, Agent or Firm:
Makoto International Patent Office