Title:
INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2019066691
Kind Code:
A
Abstract:
To provide an inspection device capable of rapidly inspecting a three-dimensional shape of an object surface.SOLUTION: An inspection device 10 comprises a line image sensor 20 configured to receive light from an object surface S, and a unit-magnification reflective imaging optical system 30 configured to form an image of light from the object surface S on the line image sensor 20. The unit-magnification reflective imaging optical system 30 comprises a concave main mirror 32, a convex sub-mirror 34, and a flat extraction mirror 36. The light from the object surface S is reflected by the concave main mirror 32, convex sub-mirror 34, and again by the concave main mirror 32 in the described order, and then is directed via the flat extraction mirror 36 to form an image on the line image sensor 20.SELECTED DRAWING: Figure 1
Inventors:
UEHARA MAKOTO
Application Number:
JP2017192772A
Publication Date:
April 25, 2019
Filing Date:
October 02, 2017
Export Citation:
Assignee:
MEJIRO67 CO LTD
International Classes:
G02B17/00; G01N21/956; G02B7/182; H01L21/66
Attorney, Agent or Firm:
Patent business corporation Tsukuni