Title:
PATTERNING METHOD AND PATTERNING DEVICE FOR ORGANIC ELECTROLUMINESCENT ELEMENT
Document Type and Number:
Japanese Patent JP2019079595
Kind Code:
A
Abstract:
To provide a patterning method for an organic electroluminescent element, high in productivity and capable of achieving accurate patterning by suppressing a mask from being thermally deformed, and also to provide a patterning device for an organic EL element for the patterning method.SOLUTION: In a patterning method for an organic electroluminescent element, a light emitting pattern of an organic electroluminescent element is formed by light irradiation through a mask, while an area to be irradiated with light through the mask is divided into a plurality of light irradiation areas. The patterning method includes: a first light irradiation step of performing light irradiation on one light irradiation area (A) among the plurality of light irradiation areas; a second light irradiation step of performing light irradiation on one light irradiation area (B) among light irradiation areas other than the light irradiation area (A); and an additional light irradiation step of performing light irradiation again on the irradiation area (A) in the first light irradiation step. The patterning method is characterized in that light irradiation steps are repeated such that an accumulated amount of irradiation light in each light irradiation area becomes a predetermined amount.SELECTED DRAWING: Figure 2
Inventors:
SHINDO HIROYUKI
OKUMURA HISAHIRO
MORIKAWA MASAHIRO
OKUMURA HISAHIRO
MORIKAWA MASAHIRO
Application Number:
JP2016054623A
Publication Date:
May 23, 2019
Filing Date:
March 18, 2016
Export Citation:
Assignee:
KONICA MINOLTA INC
International Classes:
H05B33/10; H01L51/50
Attorney, Agent or Firm:
Gwangyang International Patent Office