Title:
CARRIER DEVICE, PROCESSING SYSTEM AND GOODS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2019083597
Kind Code:
A
Abstract:
To provide a carrier device which enables a stop position of a linear actuator to be accurately detected even when a housing is thermally expanded.SOLUTION: A carrier device comprises: a mobile section which has a first upper section, a first lower section and a first side section connecting the first upper section and the first lower section; and a fixing section which has a second upper section, a second lower section and a second side section connecting the second upper section and the second lower section. A lower face of the second lower section is brought into contact with a base. The second upper section is inserted into a gap between the first upper section and the first lower section. A coil is installed on a lower face of the second upper section. A magnet is installed on an upper face of the first lower section. A scale is installed on the first upper section. A sensor is installed on a side face at an outer side of the second side section.SELECTED DRAWING: Figure 4
Inventors:
OKAZAKI RYOTA
HIROKAWA KICHINOSUKE
HIROKAWA KICHINOSUKE
Application Number:
JP2017208422A
Publication Date:
May 30, 2019
Filing Date:
October 27, 2017
Export Citation:
Assignee:
CANON KK
International Classes:
H02K41/03; B23Q7/14; B65G35/00; H02K11/21
Domestic Patent References:
| JP2002359961A | 2002-12-13 | |||
| JP2013102570A | 2013-05-23 | |||
| JP2017022155A | 2017-01-26 | |||
| JP2005278280A | 2005-10-06 | |||
| JP2003259619A | 2003-09-12 |
Foreign References:
| KR100642135B1 | 2006-11-13 | |||
| KR20140085346A | 2014-07-07 | |||
| WO2005122368A1 | 2005-12-22 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa