Title:
ENERGY RAY DETECTOR, DETECTION DEVICE, AND EQUIPMENT
Document Type and Number:
Japanese Patent JP2019087640
Kind Code:
A
Abstract:
To provide a technique advantageous for enhancing detection accuracy of an energy ray of an energy ray detector.SOLUTION: An energy ray detector includes: a semiconductor layer which is included in a detection region and a peripheral region and has a first surface and a second surface opposite to the first surface; and a wiring structure which is at least included in the detection region and disposed between a space on a first surface side with respect to the semiconductor layer and a space on a second surface side with respect to the semiconductor layer. The thickness of the semiconductor layer in at least a part of the detection region is smaller than the thickness of the peripheral region including the semiconductor layer, and the thickness of the semiconductor layer is larger than a distance between the first surface and the space on the first surface side in the detection region and a distance between the second surface and the space on the second surface side in the detection region.SELECTED DRAWING: Figure 1
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Inventors:
SAKAGUCHI KIYOFUMI
KOBAYASHI MASAHIRO
TAKAMI EIICHI
KOBAYASHI MASAHIRO
TAKAMI EIICHI
Application Number:
JP2017214831A
Publication Date:
June 06, 2019
Filing Date:
November 07, 2017
Export Citation:
Assignee:
CANON KK
International Classes:
H01L27/146; H01L31/10; H04N5/32; H04N5/369
Domestic Patent References:
| JP2013182923A | 2013-09-12 | |||
| JP2000138365A | 2000-05-16 | |||
| JP2003139703A | 2003-05-14 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa