Title:
SHOWERHEAD GAS DISTRIBUTION BODY
Document Type and Number:
Japanese Patent JP2019108588
Kind Code:
A
Abstract:
To prevent an exposed portion of a conductive layer in a recess from deforming.SOLUTION: The showerhead gas distribution body comprises: a ceramic member including a first surface having an approximately flat surface approximately vertical to a first direction and having a recess and a second surface positioned on the side opposite to the first surface in the first direction and having a plurality of open gas exhaust holes; a first conductive layer including an exposed portion exposed in the recess formed in the first surface and a buried portion arranged in the inside of the ceramic member at a position different from that of the recess in a first directional view and electrically connected to the exposed portion; a second conductive layer arranged on the second surface side to the first conductive layer and including a facing portion facing the buried portion of the first conductive layer in the first direction; and a via electrically connected to the buried portion of the first conductive layer and the facing portion of the second conductive layer.SELECTED DRAWING: Figure 4
Inventors:
NAKAGAWA HISATO
IWATA MUNEYUKI
MORIKAWA KAZUKO
IMANISHI YUTAKA
IWATA MUNEYUKI
MORIKAWA KAZUKO
IMANISHI YUTAKA
Application Number:
JP2017242375A
Publication Date:
July 04, 2019
Filing Date:
December 19, 2017
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
C23C16/455; C04B37/00
Domestic Patent References:
| JP2010034514A | 2010-02-12 | |||
| JPH09213455A | 1997-08-15 | |||
| JP2014509783A | 2014-04-21 | |||
| JP2016122724A | 2016-07-07 |
Attorney, Agent or Firm:
Patent Business Corporation Alpha International Patent Office