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Title:
METHOD FOR EVALUATING SILICA GLASS CRUCIBLE, SILICA GLASS CRUCIBLE, APPARATUS FOR PULLING SILICON SINGLE CRYSTAL AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JP2019119619
Kind Code:
A
Abstract:
To measure the glass structure of a silica glass crucible in a nondestructive manner to highly accurately determine the silica glass crucible capable of preventing dislocation from occurring when pulling a silicon single crystal.SOLUTION: The method for evaluating a silica glass crucible comprises the steps of: acquiring a Raman spectrum before use served as a Raman spectrum before pulling a silicon single crystal in a silica glass crucible to be measured; acquiring a Raman spectrum after use served as a Raman spectrum after pulling the silicon single crystal in the silica glass crucible; and evaluating the silica glass crucible on the basis of a transition to the Raman spectrum after use from the Raman spectrum before use.SELECTED DRAWING: Figure 12

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Inventors:
SATO TADAHIRO
KITAHARA KEN
KITAHARA ERIKO
SUDO TOSHIAKI
Application Number:
JP2017253107A
Publication Date:
July 22, 2019
Filing Date:
December 28, 2017
Export Citation:
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Assignee:
SUMCO CORP
International Classes:
C30B29/06; C03B20/00; C30B15/10; G01N21/65
Attorney, Agent or Firm:
Ichiro Nomura



 
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