Title:
SCALE AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2019120500
Kind Code:
A
Abstract:
To provide a scale that can provide a high diffraction efficiency and a high adhesion to a substrate, and a method for manufacturing the scale.SOLUTION: A scale includes: a substrate 10; a first metal layer on the substrate; a second metal layer on the first metal layer; and a scale lattice 40 on the second metal layer with a plurality of metal lattices arranged at predetermined intervals. The first metal layer is made of a metal having a higher adhesion with the substrate 10 than the second metal layer has, and the second metal layer is made of a metal having a higher reflectance to light than the first metal layer has.SELECTED DRAWING: Figure 1
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Inventors:
AOKI TOSHIHIKO
Application Number:
JP2017252987A
Publication Date:
July 22, 2019
Filing Date:
December 28, 2017
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01D5/347
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Attorney, Agent or Firm:
Shuhei Katayama
Kyozo Katayose
Kyozo Katayose