DEFLECTION SENSITIVITY CALCULATION METHOD AND DEFLECTION SENSITIVITY CALCULATION SYSTEM

Japanese Patent JP2019133978

A

To provide a deflection sensitivity calculation method and deflection sensitivity calculation system, for calculating deflection sensitivity of a deflector of an electronic beam irradiation apparatus.SOLUTION: There is provided an electronic beam irradiation area adjustment method for adjusting an electronic beam irradiation area of an electronic beam irradiation apparatus for irradiating an irradiation target with an electronic beam deflected by a deflector, the electronic beam irradiation area adjustment method including: an electronic beam irradiation step of controlling the deflector on the basis of an electronic beam irradiation recipe to irradiate, with an electronic beam while changing an irradiation position, an adjustment plate for detecting current corresponding to the electronic beam with which the adjustment plate is irradiated; a current acquisition step of acquiring the current detected from the adjustment plate; an image formation step of forming image data corresponding to an acquired current value; a determination step of determining whether or not the electronic beam irradiation area is appropriate, on the basis of the formed image data; and a recipe update step of updating the electronic beam irradiation recipe when it is determined that the irradiation area is inappropriate.SELECTED DRAWING: Figure 2A

TAJIMA RYO

JP2018012442A

August 08, 2019

January 29, 2018

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EBARA CORP

H01L21/027; G03F7/20; H01J37/04; H01J37/305

JP2009164323A	2009-07-23
JP2005197337A	2005-07-21
JP2016027604A	2016-02-18
JPH04144119A	1992-05-18
JPH09199072A	1997-07-31
JP2003077813A	2003-03-14
JP2004088071A	2004-03-18

Seiji Ohno
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Hiroshi Nomoto

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