Title:
HEAT TYPE FLOW SENSOR
Document Type and Number:
Japanese Patent JP2019138780
Kind Code:
A
Abstract:
To provide: a heat type flow sensor chip having two small sized temperature sensors having high sensitivity and high accuracy when measuring the flow of a fluid to be measured, having a simple structure and arranged on a thin film 10 having a heater 25; and an inexpensive small sized heat type flow sensor mounting the same and capable of specifying the flow direction and type of the fluid to be measured.SOLUTION: A heat type flow sensor chip is obtained by: forming a semiconductor thin film thermally separated from a substrate 1 by a cavity 40 into a crosslinked structure; arranging a heater in a central portion of a thin film 10; forming thin film regions A and B sandwiching the heater at a symmetrical position through a heat resistance part 45 on both sides in a flow direction, first and second thermo couples 20A and 20B in the regions and the hot junctions 81A and 81B thereof, respectively; forming a structure heated by the heater; and extracting a temperature difference signal as two terminals to the outside by serial connection. The flow direction is specified from the positive/negative of an output voltage. Temperature variable means 250 is included to change the temperature of the heater, and the type of fluid is specified as compared with data previously prepared on fluids having various thermal conductivities.SELECTED DRAWING: Figure 1
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Inventors:
KIMURA MITSUTERU
Application Number:
JP2018022614A
Publication Date:
August 22, 2019
Filing Date:
February 10, 2018
Export Citation:
Assignee:
KIMURA MITSUTERU
International Classes:
G01F1/692