Title:
VACUUM PUMP AND VACUUM PUMP CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2019143485
Kind Code:
A
Abstract:
To provide a vacuum pump which enables electric devices to be efficiently cooled.SOLUTION: A vacuum pump includes: a pump body 11 and an electric case 31 disposed at the outer side of the pump body 11. The electric case 31 includes: a cooling jacket 36 which has an inner surface 46 and an outer surface 47 in a vertical part 40 and in which a cooling medium passage 38a is formed; and multiple electric devices (33, 34) which include circuit components 62 and enable cooling by the cooling jacket 36. The inner surface 46 and the outer surface 47 are formed oriented in different directions. Each of the electric device parts (33, 34) is attached to the inner surface 46 and the outer surface 47 so as to enable heat transfer.SELECTED DRAWING: Figure 1
Inventors:
SUN YANBIN
Application Number:
JP2018025853A
Publication Date:
August 29, 2019
Filing Date:
February 16, 2018
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04; F04B37/16; F04B39/00; F04B39/06
Domestic Patent References:
| JPH07194139A | 1995-07-28 | |||
| JP2017153339A | 2017-08-31 | |||
| JP2013100760A | 2013-05-23 | |||
| JP2014043827A | 2014-03-13 | |||
| JPS642397A | 1989-01-06 | |||
| JPS645045A | 1989-01-10 | |||
| JP2010079397A | 2010-04-08 | |||
| JP2015049443A | 2015-03-16 |
Foreign References:
| WO2012053271A1 | 2012-04-26 | |||
| WO2011111209A1 | 2011-09-15 | |||
| DE102007028475A1 | 2008-09-04 |
Attorney, Agent or Firm:
Koji Mizuno
Ryo Matsushita
Keita Noguchi
Teruie Taniyama
Ryo Matsushita
Keita Noguchi
Teruie Taniyama