Title:
WAVELENGTH VARIABLE MEMS FABRY-PEROT FILTER
Document Type and Number:
Japanese Patent JP2019145797
Kind Code:
A
Abstract:
To provide a wavelength variable gain medium accompanied by a cavity adjustment by a fabry-perot (FP) filter of a fine electric machine system (MEMS) base as a wavelength variable laser.SOLUTION: A system includes a laser cavity for a wavelength selection, and a filter cavity. The laser cavity is composed of a gain medium such as a semiconductor optical amplifier (SOA), two collimating lenses, and an end part reflector. A MEMS-FP filter 210 cavity includes a fixed reflector 114 and a movable reflector 115 which cab be controlled with electrostatic force. By moving a MEMS reflector to change an FP filter cavity length, a wavelength can be adjusted. A deviation of the MEMS-FP filter cavity can be separately adjusted by a step voltage or continuously adjusted by a continuous driving voltage. A wavelength variable range can be extended to different wavelength variable ranges of 30 nm, 40 nm, and 100 nm or over.SELECTED DRAWING: Figure 2A
Inventors:
MOHAMMAD KAMAL
LI TONGNING
DAVID EU
QI QINIAN
LI TONGNING
DAVID EU
QI QINIAN
Application Number:
JP2019031363A
Publication Date:
August 29, 2019
Filing Date:
February 25, 2019
Export Citation:
Assignee:
INPHENIX INC
International Classes:
H01S5/14; B81B3/00; G02B1/11; G02B5/26; G02B5/28; G02B26/00; H01S5/022; H01S5/50
Domestic Patent References:
| JP2001042232A | 2001-02-16 | |||
| JP2007086517A | 2007-04-05 | |||
| JP2002500446A | 2002-01-08 | |||
| JP2002511199A | 2002-04-09 | |||
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Foreign References:
| US20060215713A1 | 2006-09-28 | |||
| WO2003052506A1 | 2003-06-26 | |||
| US20020031155A1 | 2002-03-14 | |||
| US20050008045A1 | 2005-01-13 | |||
| US20060118721A1 | 2006-06-08 | |||
| US20070183643A1 | 2007-08-09 |
Attorney, Agent or Firm:
Kenji Sugimura
Toshio Fukui
Toshio Fukui