Title:
VALVE, FLUID DEVICE, FLUID CONTROL METHOD AND METHOD FOR MANUFACTURING VALVE
Document Type and Number:
Japanese Patent JP2019148340
Kind Code:
A
Abstract:
To provide a valve that has excellent durability, and to provide a fluid device, a fluid control method and a method for manufacturing a valve.SOLUTION: A valve includes: a cylindrical structure having an outer cylinder part and an inner cylinder part; and a diaphragm member having a thin film part that is provided so as to cover one end of the inner cylinder part and an anchor part that encircles around a circumference of the thin film part and adheres along an inside wall of the outer cylinder part and an outside wall of the inner cylinder part.SELECTED DRAWING: Figure 4A
More Like This:
| WO/2014/086534 | MEMBRANE VALVE |
| JPH08210528 | VALVE |
Inventors:
ICHIKI TAKANORI
TERANE SHOTARO
SUZUKI KUNO
TERANE SHOTARO
SUZUKI KUNO
Application Number:
JP2019093175A
Publication Date:
September 05, 2019
Filing Date:
May 16, 2019
Export Citation:
Assignee:
UNIV TOKYO
NIKON CORP
NIKON CORP
International Classes:
F16K7/12; B81B3/00; B81C3/00; F04B9/08
Domestic Patent References:
| JPS5435413A | 1979-03-15 | |||
| JP2014005856A | 2014-01-16 | |||
| JP2000310462A | 2000-11-07 |
Foreign References:
| WO2014016881A1 | 2014-01-30 | |||
| US1992043A | 1935-02-19 | |||
| US6416038B1 | 2002-07-09 |
Attorney, Agent or Firm:
Nishizawa Kazumi
Kazunori Onami
Junichi Kobayashi
Kazunori Onami
Junichi Kobayashi