Title:
X-RAY CT APPARATUS FOR MEASUREMENT
Document Type and Number:
Japanese Patent JP2019152611
Kind Code:
A
Abstract:
To enable efficient and highly accurate X-ray CT measurement by reducing calibration work with no need to reset a slice plane when moving a rotary table.SOLUTION: Disclosed is an X-ray CT apparatus 1 for measurement, which includes a rotary table 6 on which a measuring object W is mounted and a scanning mechanism (5) capable of moving the rotary table 6 to any position in a measurement space area between an X-ray source 2 and an X-ray detector 4. In this X-ray CT apparatus, inclination detecting means (16, 17) are provided for detecting the inclination (φ) of a rotary shaft 8 of the rotary table 6, and the measured value is corrected using the output from the inclination detection means (16, 17).SELECTED DRAWING: Figure 4
Inventors:
SAKAI HISAYOSHI
TAKAHASHI TETSUTO
SASAKI SEIJI
KOBAYASHI KANAE
TAKAHASHI TETSUTO
SASAKI SEIJI
KOBAYASHI KANAE
Application Number:
JP2018039719A
Publication Date:
September 12, 2019
Filing Date:
March 06, 2018
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01N23/046
Domestic Patent References:
| JP2005296340A | 2005-10-27 | |||
| JP2010151775A | 2010-07-08 | |||
| JP2012161471A | 2012-08-30 |
Foreign References:
| US20150260859A1 | 2015-09-17 |
Attorney, Agent or Firm:
Satoshi Takaya
Keisuke Matsuyama
Takashi Fujita
Shuzo Sudo
Keisuke Matsuyama
Takashi Fujita
Shuzo Sudo