Title:
ACTUATOR AND OPTICAL SCANNING DEVICE
Document Type and Number:
Japanese Patent JP2019152725
Kind Code:
A
Abstract:
To enable utilization of even a measurement device in which light interference is utilized by suppressing displacement in the thickness direction of an actuator.SOLUTION: An actuator of the present invention includes: a driving beam having a beam extending in a direction perpendicular to a predetermined axis and connected to a driving object; a drive source formed on one side of the beam; and a rib formed on the other side of the beam. A notch is formed in a portion opposite to the end of the rib of the drive source. The driving object is driven to swing in the direction of rotating a predetermined axis by driving the drive source.SELECTED DRAWING: Figure 1
Inventors:
YAMADA KENSUKE
Application Number:
JP2018037056A
Publication Date:
September 12, 2019
Filing Date:
March 02, 2018
Export Citation:
Assignee:
MITSUMI ELECTRIC CO LTD
International Classes:
G02B26/10; B81B3/00; G02B26/08
Domestic Patent References:
| JP2014235298A | 2014-12-15 | |||
| JP2013078219A | 2013-04-25 |
Foreign References:
| US20130194555A1 | 2013-08-01 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito