Title:
HOLDER AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2019155577
Kind Code:
A
Abstract:
To provide a holder which prevents peeling between a holding sheet and a frame material, and a method for manufacturing the same.SOLUTION: A holder for holding a polished object when the polished object is polished includes a holding sheet which holds a surface on opposite side to a surface to be polished of the polished object, a frame material which is fixed onto the holding sheet and holds a side part of the polished object in polishing, and an adhesive for fixing the frame material onto the holding sheet, in which the frame material contains a resin and one or more fibers, a resin and a fiber are present on the surface of the frame material in contact with the holding sheet via the adhesive, and a difference in solubility parameter among the fiber present on the surface of the frame material, a resin present on the surface of the frame material and the adhesive is 10 or less.SELECTED DRAWING: Figure 1
Inventors:
SUZUKI MOTOFUMI
SATO KOUTA
SATO KOUTA
Application Number:
JP2018049496A
Publication Date:
September 19, 2019
Filing Date:
March 16, 2018
Export Citation:
Assignee:
FUJIBO HOLDINGS INC
International Classes:
B24B37/32; B24B37/30; H01L21/304
Domestic Patent References:
| JP2009202314A | 2009-09-10 | |||
| JP2017177266A | 2017-10-05 | |||
| JP2003117808A | 2003-04-23 | |||
| JP2010099767A | 2010-05-06 |
Foreign References:
| US20050208881A1 | 2005-09-22 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Disciple Maru Ken
▲吉▼田 和彦
Atsushi Hakoda
Kenji Asai
Kazuo Yamazaki
Satsuki Ichikawa
Hironobu Hattori
Yasushi Sasaki
Disciple Maru Ken
▲吉▼田 和彦
Atsushi Hakoda
Kenji Asai
Kazuo Yamazaki
Satsuki Ichikawa
Hironobu Hattori
Yasushi Sasaki